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Mass Flow Controller Product List

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Mass Flow Controller "MARU3000s"

Mass Flow Controller "MARU3000s"

It has excellent corrosion resistance and demonstrates outstanding performance for the cost! A reasonably priced high-flow thermal mass flow controller.

This product is a mass flow controller (MFC) with a thermal sensor base that applies a metal seal for high flow rates (up to 500 slm). It features excellent performance relative to cost while being reasonably priced. By applying a metal seal, it offers outstanding corrosion resistance. 【Features】 ■ Reasonably priced MFC ■ Excellent performance relative to cost ■ Outstanding corrosion resistance *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass Flow Controller

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Pressure-independent MFC "MARU7000s"

Pressure-independent MFC "MARU7000s"

Achieves excellent corrosion resistance and leak characteristics through EP processing! A pressure-independent MFC that demonstrates outstanding flow stability.

The "MARU7000s" is a thermal + pressure sensor-based MFC that ensures excellent corrosion resistance and leak characteristics while demonstrating high flow stability. This product achieves high corrosion resistance and leak characteristics through EP treatment. Furthermore, it exhibits excellent flow stability due to its PI function, enabling superior crosstalk control. It features pressure insensitivity (pressure independence) and allows for the selection of valve types suitable for medium to large flow, such as Solenoid Valves, or for small to heavy flow, such as Piezo Valves. As a product portfolio built on domestic technology, it provides mass flow total solutions across various fields, including semiconductors, displays, and general industries. 【Features】 ■ Excellent corrosion resistance and leak performance with EP treatment ■ Superior flow stability with PI function ■ Excellent crosstalk control *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass Flow Controller

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